Work function tunability by incorporating lanthanum and aluminum into refractory metal nitrides and a feasible integration process

Xin Peng Wang*, Ming Fu Li, H. Y. Yu, C. Ren, W. Y. Loh, C. X. Zhu, Albert Chin, A. D. Trigg, Yee Chia Yeo, S. Biesemans, G. Q. Lo, D. L. Kwong

*Corresponding author for this work

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Engineering & Materials Science