Widely tunable Al2O3-GaAs DBR filters with variable tuning characteristics

Chien-Chung Lin*, Junxian Fu, James S. Harris

*Corresponding author for this work

研究成果: Article同行評審

5 引文 斯高帕斯(Scopus)

摘要

We demonstrate an optical tunable filter using Al2O 3-GaAs layers as the top distributed Bragg reflector mirror. The mechanical properties and spectral response versus voltage are characterized. The tuning characteristics can be changed by removing the tensile-stressed Si3N4 on the mirror and legs. An integrated optical-mechanical model is used to analyze the result. Axial nitride and initial residual stress are incorporated into the model to obtain accurate fit. A 64-nm tuning range with 12-V tuning voltage is measured, a significant improvement over previous designs.

原文English
頁(從 - 到)614-621
頁數8
期刊IEEE Journal on Selected Topics in Quantum Electronics
10
發行號3
DOIs
出版狀態Published - 五月 2004

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