We demonstrate an optical tunable filter using Al2O 3-GaAs layers as the top distributed Bragg reflector mirror. The mechanical properties and spectral response versus voltage are characterized. The tuning characteristics can be changed by removing the tensile-stressed Si3N4 on the mirror and legs. An integrated optical-mechanical model is used to analyze the result. Axial nitride and initial residual stress are incorporated into the model to obtain accurate fit. A 64-nm tuning range with 12-V tuning voltage is measured, a significant improvement over previous designs.
|頁（從 - 到）||614-621|
|期刊||IEEE Journal on Selected Topics in Quantum Electronics|
|出版狀態||Published - 五月 2004|