Very low Vt [Ir-Hf]/HfLaO CMOS using novel self-aligned low temperature shallow junctions

C. F. Cheng, C. H. Wu, N. C. Su, S. J. Wang, S. P. McAlister, Albert Chin

研究成果: Conference article同行評審

30 引文 斯高帕斯(Scopus)

指紋 深入研究「Very low V<sub>t</sub> [Ir-Hf]/HfLaO CMOS using novel self-aligned low temperature shallow junctions」主題。共同形成了獨特的指紋。

Physics & Astronomy

Chemical Compounds

Engineering & Materials Science