TRIAD: A triple patterning lithography aware detailed router

Yen Hung Lin*, Bei Yu, David Z. Pan, Yih-Lang Li

*Corresponding author for this work

研究成果: Conference article同行評審

35 引文 斯高帕斯(Scopus)

摘要

TPL-friendly detailed routers require a systematic approach to detect TPL conflicts. However, the complexity of conflict graph (CG) impedes directly detecting TPL conflicts in CG. This work proposes a token graph-embedded conflict graph (TECG) to facilitate the TPL conflict detection while maintaining high coloring-flexibility. We then develop a TPL aware detailed router (TRIAD) by applying TECG to a gridless router with the TPL stitch generation. Compared to a greedy coloring approach, experimental results indicate that TRIAD generates no conflicts and few stitches with shorter wirelength at the cost of 2.41× of runtime.

原文English
文章編號6386598
頁(從 - 到)123-129
頁數7
期刊IEEE/ACM International Conference on Computer-Aided Design, Digest of Technical Papers, ICCAD
DOIs
出版狀態Published - 1 十二月 2012
事件2012 30th IEEE/ACM International Conference on Computer-Aided Design, ICCAD 2012 - San Jose, CA, United States
持續時間: 5 十一月 20128 十一月 2012

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