Tip-induced anodization of titanium surfaces by scanning tunneling microscopy: A humidity effect on nanolithography

Hiroyuki Sugimura*, Tatsuya Uchida, Noboru Kitamura, Hiroshi Masuhara

*Corresponding author for this work

研究成果: Article同行評審

112 引文 斯高帕斯(Scopus)

摘要

A scanning tunneling microscope was employed for tip-induced anodization of titanium (Ti) surfaces. Spatial resolution of fabricated patterns was remarkably affected by the tip shape and humidity in the atmosphere. The amount of adsorbed water on the Ti surface determined by humidity has a key role in controlling the resolution, and the resolution becomes worse with increasing humidity. Under the optimized conditions, tip-induced anodization of Ti was successfully achieved with a spatial resolution of 30 nm.

原文English
頁(從 - 到)1288-1290
頁數3
期刊Applied Physics Letters
63
發行號9
DOIs
出版狀態Published - 1 十二月 1993

指紋 深入研究「Tip-induced anodization of titanium surfaces by scanning tunneling microscopy: A humidity effect on nanolithography」主題。共同形成了獨特的指紋。

引用此