The optical properties of monolayer amorphous Al 2 O 3 -TiO 2 composite films used as HT-APSM blanks for ArF immersion lithography

Fu Der Lai*, C. Y. Huang, Fu-Hsiang Ko

*Corresponding author for this work

研究成果: Article同行評審

2 引文 斯高帕斯(Scopus)

指紋 深入研究「The optical properties of monolayer amorphous Al <sub>2</sub> O <sub>3</sub> -TiO <sub>2</sub> composite films used as HT-APSM blanks for ArF immersion lithography」主題。共同形成了獨特的指紋。

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy