The Influence of AlN Nucleation Layer on Radio Frequency Transmission Loss of AlN-on-Si Heterostructure

Shane Chang*, Ming Zhao, Valentina Spampinato, Alexis Franquet, Thi Hien Do, Akira Uedono, Tien Tung Luong, Tsang Hsuan Wang, Li Chang

*Corresponding author for this work

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Chemical Compounds

Engineering & Materials Science

Physics & Astronomy