The inductance enhancement study of spiral inductor using Ni-AAO nanocomposite core

M. C. Hsu, T. Y. Chao, Yu-Ting Cheng, C. M. Liu, Chih Chen

研究成果: Article同行評審

21 引文 斯高帕斯(Scopus)

摘要

The letter presents the fabrication and characterization of on-chip spiral inductors with Ni-anodic alumina oxide (Ni-AAO) nanocomposite core. Ni nanorods with 70 nm diameter are deposited and isolated in an AAO matrix to form a layer of nanocomposite on silicon substrate. About 3% inductance enhancement to the inductor with the nanocomposite core has been observed and the enhancement can be kept up more than 6 GHz. Because the proposed inductance enhancement scheme using ferromagnetic-AAO-based nanocomposite as inductor core employs a CMOS-compatible fabrication process with the characteristics that can be further improved, it is our belief that the scheme has a great potential application for future radio frequency integrated circuitry (RFIC) manufacture.

原文English
文章編號4796318
頁(從 - 到)281-285
頁數5
期刊IEEE Transactions on Nanotechnology
8
發行號3
DOIs
出版狀態Published - 1 五月 2009

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