A new off-state leakage current unique for short-channel SOI MOSFET’s is reported. This off-state leakage is the amplification of gate-induced-drain-leakage (GIDL) current by the lateral bipolar transistor in a SOI device due to the floating body. The leakage current can be enhanced by as much as 100 times for l/4-μm SOI devices. This can pose severe constraints in future 0.1-μm SOI device design. A novel technique was developed based on this mechanism to measure the lateral bipolar transistor current gain β of SOI devices without using a body contact.