The deterioration of a-IGZO TFTs owing to the copper diffusion after the process of the sourcedrain metal formation

Ya-Hsiang Tai*, Hao Lin Chiu, Lu Sheng Chou

*Corresponding author for this work

研究成果: Article同行評審

67 引文 斯高帕斯(Scopus)

指紋 深入研究「The deterioration of a-IGZO TFTs owing to the copper diffusion after the process of the sourcedrain metal formation」主題。共同形成了獨特的指紋。

Chemical Compounds

Engineering & Materials Science