Synthesis of wafer-scale WSe2 by WOx selenization on SiO2 / Si substrates

Yung Ching Chu, Chao An Jong, Yen Teng Ho, Ming Zhang, Po Yen Chien, Hung Ru Hsu, Hung Yi Chen, Yung Yi Tu, Krishna P. Pande, Jason C.S. Woo, Edward Yi Chang

研究成果: Conference contribution同行評審

摘要

Scalable synthesis of thin tungsten diselenide (WSe2) films on 4-inch silicon substrate with 80 nm silicon dioxide (SiO2) is demonstrated. Cross-sectional transmission electron microscopy (TEM) reveals good control of WSe2 layers. Raman spectroscopy confirms high quality crystal of WSe2 is achieved. Back-gated field-effect transistors (FETs) fabricated on these thin films exhibit p-channel characteristics with a good on/off current ratio larger than 1.2 × 102.

原文English
主出版物標題2016 IEEE Silicon Nanoelectronics Workshop, SNW 2016
發行者Institute of Electrical and Electronics Engineers Inc.
頁面54-55
頁數2
ISBN(電子)9781509007264
DOIs
出版狀態Published - 27 九月 2016
事件21st IEEE Silicon Nanoelectronics Workshop, SNW 2016 - Honolulu, United States
持續時間: 12 六月 201613 六月 2016

出版系列

名字2016 IEEE Silicon Nanoelectronics Workshop, SNW 2016

Conference

Conference21st IEEE Silicon Nanoelectronics Workshop, SNW 2016
國家United States
城市Honolulu
期間12/06/1613/06/16

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