Study on nanoscale bombardment dynamics using molecular dynamics

Y. L. Yeh, B. H. Chen, Chao Ho Lan, Jie Ren Ku, Chung-Wei Cheng, Shing Cheng Chang, Cha'o Kuang Chen, M. J. Jang, C. C. Wang

研究成果: Conference contribution同行評審

摘要

The present study has investigated the cluster deposition process of thin film formation. MD simulation has been employed to study the morphology of the collision system and to investigate the transient behavior, which occurred between the atoms of the deposited cluster and the substrate. The substrate relaxation process and the influence of the incident energy were also discussed. A traveling condition of the cluster for random incidences was applied in the simulations, and the ratio of translational and total kinetic energy of clusters were varied to observe their influence on the cluster's diffusivity. It was found that the system's reconstruction phenomena tended to recover the lattice structure, which was disordered by the impact cluster. After thermal equilibrium, the partial wetting behaviors or cluster embedded morphology were observed according to different incident energy. In the "impact process", the high local temperature and high heat transfer rate were observed due to the high compressibility of the impact zone. By changing the ratio of translational and total kinetic energy of clusters, the simulation results indicated that translational kinetic energy of cluster contributed to the local temperature raising and the interpenetration of cluster atoms, while the vibrational energy benefited the spreading behaviors of cluster.

原文English
主出版物標題2009 IEEE 3rd International Conference on Nano/Molecular Medicine and Engineering, NANOMED 2009
頁面18-23
頁數6
DOIs
出版狀態Published - 1 十二月 2009
事件2009 IEEE 3rd International Conference on Nano/Molecular Medicine and Engineering, NANOMED 2009 - Tainan, Taiwan
持續時間: 18 十月 200921 十月 2009

出版系列

名字2009 IEEE 3rd International Conference on Nano/Molecular Medicine and Engineering, NANOMED 2009

Conference

Conference2009 IEEE 3rd International Conference on Nano/Molecular Medicine and Engineering, NANOMED 2009
國家Taiwan
城市Tainan
期間18/10/0921/10/09

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