Real-time detection of linear and angular displacements with a modified DVD optical head

En Te Hwu*, Shao-Kang Hung, Chih Wen Yang, Kuang Yuh Huang, Ing Shouh Hwang

*Corresponding author for this work

研究成果: Article同行評審

37 引文 斯高帕斯(Scopus)

摘要

Here we demonstrate that an astigmatic detection system (ADS), constructed with a modified digital-versatile-disk (DVD) optical head, can achieve real-time measurement of a linear displacement and two-dimensional (2D) tilt angles with a high sensitivity. An atomic force microscope (AFM), using our detection system to sense the deflection of microfabricated cantilevers, can resolve single atomic steps on graphite surfaces with a noise level less than 0.04 nm in topographic images. This astigmatic detection system can even detect mechanical resonances due to thermal vibrations of microfabricated cantilevers. The high sensitivity, small detecting size and high bandwidth of this detection system is suitable for dynamic characterization of elements in micromachined components. Further optimization of the system will promise many other applications in diverse technological fields.

原文English
文章編號115501
期刊Nanotechnology
19
發行號11
DOIs
出版狀態Published - 18 二月 2008

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