The optical characteristics such as, ultra-low optical constants, for porous MSQ films, and epoxy based SU-8 resist were investigated for integrated optical devices applications. The refractive index of porous MSQ is found to decrease to around 1.320 as the hydration time exceed 24 hours. The measure refractive index is about 1.163 at 1550 nm wavelength. It is found that due to low refractive index and low absorption in the large spectra regimes, porous MSQ films would be cladding materials.
|主出版物標題||Digest of Papers - Microprocesses and Nanotechnology 2004|
|出版狀態||Published - 1 十二月 2004|
|事件||2004 International Microprocesses and Nanotechnology Conference - Osaka, Japan|
持續時間: 26 十月 2004 → 29 十月 2004
|名字||Digest of Papers - Microprocesses and Nanotechnology 2004|
|Conference||2004 International Microprocesses and Nanotechnology Conference|
|期間||26/10/04 → 29/10/04|