Passivation of defects in a-Si:H TFTs with 150°C supercritical fluids

Po Yu Yang*, Po-Tsun Liu, Ting Chang Chang, Yi Li Cheng

*Corresponding author for this work

研究成果: Conference contribution

摘要

In this study, the supercritical fluids act the transporter and deliver H2O molecule into the a-Si:H film for repairing defects. From experiment results, superior transfer characteristic is obtained after the treatment of supercritical fluids mixed with water and propyl-alcohol. Besides, density of states is also reduced significantly during this processing.

原文English
主出版物標題IDMC 2007 - International Display Manufacturing Conference and FPD Expo - Proceedings
頁面500-502
頁數3
出版狀態Published - 1 十二月 2007
事件International Display Manufacturing Conference and Exhibition, IDMC 2007 - Taipei, Taiwan
持續時間: 3 七月 20076 七月 2007

出版系列

名字IDMC 2007 - International Display Manufacturing Conference and FPD Expo - Proceedings

Conference

ConferenceInternational Display Manufacturing Conference and Exhibition, IDMC 2007
國家Taiwan
城市Taipei
期間3/07/076/07/07

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