Optical properties of surface micromachining with randomly distributed etch holes

Chung-Hao Tien*, Chi Hung Lee

*Corresponding author for this work

研究成果: Article同行評審

摘要

Optical micromachining or microelectromechanical systems (MEMS) typically require etch holes to reduce the time required to release the micromechanical structure during the sacrificial undercutting. However, high-order diffraction beams generated by the periodic etch-hole array often deteriorate the optical performance by generating noise and erroneous crosstalk signals in most optical systems. In this study, we examined the diffraction from a perforated micromirror and proposed a random distributed etch-hole layout. Due to the superposition of cosine functions with random periods, noise caused by high-order beams can be averaged effectively.

原文English
頁(從 - 到)1015-1017
頁數3
期刊Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
45
發行號2 A
DOIs
出版狀態Published - 8 二月 2006

指紋 深入研究「Optical properties of surface micromachining with randomly distributed etch holes」主題。共同形成了獨特的指紋。

引用此