Zn1-xMnxO films (0≤x≤ 0.070) were grown by plasma-assisted molecular beam epitaxy on Si substrates with AlN buffer layers. For low Mn concentration samples, x≤ 0.02 , photoluminescence spectra show strong near band edge emission. Strong phonon and exciton coupling-induced resonant Raman scattering was observed. Paramagnetic, antiferromagnetic, and ferromagnetic phases were observed. Room temperature ferromagnetism for all samples was attributed to the bound magnetic polaron effect.