Novel pretreatment technology for organic low-dielectric material to suppress copper diffusion and improve ashing resistance
Kow-Ming Chang, I. Chung Deng, Yao Pin Tsai, Chan Yang Wen, Sy Jer Yeh, Shih Wei Wang, Jin Yea Wang
研究成果: Article › 同行評審
Kow-Ming Chang, I. Chung Deng, Yao Pin Tsai, Chan Yang Wen, Sy Jer Yeh, Shih Wei Wang, Jin Yea Wang
研究成果: Article › 同行評審