A novel ion implantation method for electrostatic discharge protection, often called as ESD implantation, is proposed to significantly improve machine-model (MM) ESD robustness of N-channel metal-oxide semiconductors (NMOS) device in stacked configuration (stacked NMOS). By using this ESD implantation method, the ESD current is discharged far away from the surface channel of NMOS, therefore the stacked NMOS in the mixed-voltage I/O interface can sustain a much higher ESD level, especially under the MM ESD stress. The MM ESD robustness of the stacked NMOS with a device dimension of W/L = 300 μm/0.5 μm for each NMOS has been successfully improved from the original 358 V to become 491 V in a 0.25-μm complementary metal-oxide semiconductors (CMOS) process.
|頁（從 - 到）||L1288-L1290|
|期刊||Japanese Journal of Applied Physics, Part 2: Letters|
|出版狀態||Published - 15 十一月 2002|