Novel electrothermal bimorph actuator for large out-of-plane displacement and force

J. Wei*, T. Chu Duc, Gih Keong Lau, P. M. Sarro

*Corresponding author for this work

研究成果: Conference contribution同行評審

9 引文 斯高帕斯(Scopus)

摘要

This paper presents a novel concept and experimental validation of an electrothermal bimorph structure for out-of-plane actuation that exploits the polymer constraint effect. The proposed concept is capable of generating large out-of-plane displacements and forces at a low driving voltage and a low actuation temperature. A downward displacement up to 31 ?m is measured at only 5 V driving voltage and 46 mW power consumption. The actuator stiffness is measured to be 75 N/m, thus the corresponding calculated out-of-plane force is 2.3 mN. The maximum actuation temperature during the measurement is 100°C (80°C change). A 25 Hz response frequency is measured by monitoring the resistance change due to the temperature variation.

原文English
主出版物標題MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems
頁面46-49
頁數4
DOIs
出版狀態Published - 29 八月 2008
事件21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson - Tucson, AZ, United States
持續時間: 13 一月 200817 一月 2008

出版系列

名字Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN(列印)1084-6999

Conference

Conference21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson
國家United States
城市Tucson, AZ
期間13/01/0817/01/08

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