Nearly fully transparent InGaZnO thin film transistors with Mo-InGaZnO electrodes: The possibility of homogeneous InGaZnO based thin film transistors

Hung Chi Wu, Chao-Hsin Chien

研究成果: Conference contribution同行評審

摘要

In this letter, we demonstrate high performance and highly transparent InGaZnO thin film transistors (IGZO-TFTs) with nearly metal-free Mo doped IGZO source/drain (S/D) electrodes by co-sputtering. The electrical parameters such as filed effect mobility, on/off ratio and subthreshold swing are 15.9 cm2/V sec, 3.82×107 and 300 mV/decade, respectively. The electrical performance and reliability of the IGZO-TFTs with Mo-IGZO S/D electrodes are comparable with the conventional IGZO-TFTs with Mo electrodes. Besides, the transparency is remarkably improved. With the optimized condition, the transmittance of the IGZO-TFTs with Mo-IGZO S/D electrodes can be >70%. From XPS material analysis, the addition of Mo can change the oxygen bonding states in IGZO, which may be the reason for the observed conductor behavior of IGZO. Hence, the formation of Mo-IGZO S/D electrodes with co-sputtering is a simple, cost effective and low temperature method for achieving fully transparent IGZO-TFTs with high electrical performance and well reliability.

原文English
主出版物標題Proceedings - 2014 International Conference on Information Science, Electronics and Electrical Engineering, ISEEE 2014
編輯Shaozi Li, Yun Cheng, Ying Dai, Xiaohong Jiang
發行者Institute of Electrical and Electronics Engineers Inc.
頁面1709-1713
頁數5
ISBN(電子)9781479931965
DOIs
出版狀態Published - 5 十一月 2014
事件2014 International Conference on Information Science, Electronics and Electrical Engineering, ISEEE 2014 - Sapporo City, Hokkaido, Japan
持續時間: 26 四月 201428 四月 2014

出版系列

名字Proceedings - 2014 International Conference on Information Science, Electronics and Electrical Engineering, ISEEE 2014
3

Conference

Conference2014 International Conference on Information Science, Electronics and Electrical Engineering, ISEEE 2014
國家Japan
城市Sapporo City, Hokkaido
期間26/04/1428/04/14

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