MODELING THE AC IMPEDANCE OF THE POLYSILICON-SILICON INTERFACE.

David Burnett*, Chen-Ming Hu, Ashok Kapoor, Duc Nguyen, Cary Yang

*Corresponding author for this work

研究成果: Paper同行評審

摘要

The ac impedance of the polysilicon-silicon interface is investigated over a range of frequency and voltage. The structure used to study the impedance in an n** plus buried layer resistor with polysilicon-silicon contacts. It is found that the ac impedance of the polysilcon-silicon interface can be modeled as a frequency-independent parallel resistance and capacitance. For devices with significant interfaces, the resistance is voltage-dependent; for clean interfaces, the resistance is voltage-independent.

原文English
頁面154-156
頁數3
出版狀態Published - 1 十二月 1987

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