Microwave coplanar filters on Si substrates

K. T. Chan*, Albert Chin, J. T. Kuo, Chi-Yang Chang, D. S. Duh, W. J. Lin, Chunxiang Zhu, M. F. Li, Dim Lee Kwong

*Corresponding author for this work

研究成果: Conference article同行評審

6 引文 斯高帕斯(Scopus)

摘要

The excellent RF performance for band-pass and band-stop microwave coplanar filters at 22∼94 GHz on silicon substrates was achieved using an optimized proton implantation process. The implantation process was optimized for better compatibility with VLSI process. The equivalent circuit model was further used to analyze the substrate loss effects of the band pass filter.

原文English
頁(從 - 到)1909-1912
頁數4
期刊IEEE MTT-S International Microwave Symposium Digest
3
DOIs
出版狀態Published - 18 八月 2003
事件2003 IEEE MTT-S International Microwave Symposium Digest - Philadelphia, PA, United States
持續時間: 8 六月 200313 六月 2003

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