Microstructure and optical properties of scandium oxide thin films prepared by metalorganic chemical-vapor deposition

Z. Xu; A. Daga; H. D. Chen

doi:10.1063/1.1424072

Microstructure and optical properties of scandium oxide thin films prepared by metalorganic chemical-vapor deposition

Z. Xu^*, A. Daga, H. D. Chen

^*Corresponding author for this work

國際半導體產業學院

研究成果: Article › 同行評審

39 引文斯高帕斯（Scopus）

摘要

Dense, high-index, and reproducible scandium oxide (Sc₂O₃) thin films with high mechanical strength were grown on glass substrates by metalorganic chemical-vapor deposition. The influence of deposition temperature on the microstructure evolution and optical properties of Sc₂O₃ thin films was investigated by x-ray diffraction, scanning electron microscopy, atomic-force microscopy, transmission electron microscopy, and spectrophotometry. A close relationship between microstructure and optical properties was found for Sc₂O₃ thin films prepared at different deposition temperatures.

原文	English
頁（從 - 到）	3782-3784
頁數	3
期刊	Applied Physics Letters
卷	79
發行號	23
DOIs	https://doi.org/10.1063/1.1424072
出版狀態	Published - 3 十二月 2001

存取文件

10.1063/1.1424072

指紋深入研究「Microstructure and optical properties of scandium oxide thin films prepared by metalorganic chemical-vapor deposition」主題。共同形成了獨特的指紋。

引用此

@article{7050b0fcd38249cba70620ac3b57b557,

title = "Microstructure and optical properties of scandium oxide thin films prepared by metalorganic chemical-vapor deposition",

abstract = "Dense, high-index, and reproducible scandium oxide (Sc2O3) thin films with high mechanical strength were grown on glass substrates by metalorganic chemical-vapor deposition. The influence of deposition temperature on the microstructure evolution and optical properties of Sc2O3 thin films was investigated by x-ray diffraction, scanning electron microscopy, atomic-force microscopy, transmission electron microscopy, and spectrophotometry. A close relationship between microstructure and optical properties was found for Sc2O3 thin films prepared at different deposition temperatures.",

author = "Z. Xu and A. Daga and Chen, {H. D.}",

year = "2001",

month = dec,

day = "3",

doi = "10.1063/1.1424072",

language = "English",

volume = "79",

pages = "3782--3784",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

number = "23",

}

TY - JOUR

T1 - Microstructure and optical properties of scandium oxide thin films prepared by metalorganic chemical-vapor deposition

AU - Xu, Z.

AU - Daga, A.

AU - Chen, H. D.

PY - 2001/12/3

Y1 - 2001/12/3

N2 - Dense, high-index, and reproducible scandium oxide (Sc2O3) thin films with high mechanical strength were grown on glass substrates by metalorganic chemical-vapor deposition. The influence of deposition temperature on the microstructure evolution and optical properties of Sc2O3 thin films was investigated by x-ray diffraction, scanning electron microscopy, atomic-force microscopy, transmission electron microscopy, and spectrophotometry. A close relationship between microstructure and optical properties was found for Sc2O3 thin films prepared at different deposition temperatures.

AB - Dense, high-index, and reproducible scandium oxide (Sc2O3) thin films with high mechanical strength were grown on glass substrates by metalorganic chemical-vapor deposition. The influence of deposition temperature on the microstructure evolution and optical properties of Sc2O3 thin films was investigated by x-ray diffraction, scanning electron microscopy, atomic-force microscopy, transmission electron microscopy, and spectrophotometry. A close relationship between microstructure and optical properties was found for Sc2O3 thin films prepared at different deposition temperatures.

UR - http://www.scopus.com/inward/record.url?scp=0035803355&partnerID=8YFLogxK

U2 - 10.1063/1.1424072

DO - 10.1063/1.1424072

M3 - Article

AN - SCOPUS:0035803355

VL - 79

SP - 3782

EP - 3784

JO - Applied Physics Letters

JF - Applied Physics Letters

SN - 0003-6951

IS - 23

ER -