Microstructure and optical properties of scandium oxide thin films prepared by metalorganic chemical-vapor deposition

Z. Xu*, A. Daga, H. D. Chen

*Corresponding author for this work

研究成果: Article同行評審

39 引文 斯高帕斯(Scopus)

摘要

Dense, high-index, and reproducible scandium oxide (Sc2O3) thin films with high mechanical strength were grown on glass substrates by metalorganic chemical-vapor deposition. The influence of deposition temperature on the microstructure evolution and optical properties of Sc2O3 thin films was investigated by x-ray diffraction, scanning electron microscopy, atomic-force microscopy, transmission electron microscopy, and spectrophotometry. A close relationship between microstructure and optical properties was found for Sc2O3 thin films prepared at different deposition temperatures.

原文English
頁(從 - 到)3782-3784
頁數3
期刊Applied Physics Letters
79
發行號23
DOIs
出版狀態Published - 3 十二月 2001

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