@inproceedings{2b65855ef2d9415ea386383d06e9d76a,
title = "Micro knife-edge optical measurement devices fabricated by SOI and CMOS MEMS processes",
abstract = "The knife-edge method is a commonly used technique to characterize the optical profiles of laser beams or focused optical spots. In this paper, we present the design, fabrication, and test of a micro knife-edge scanner based on the micro-electromechanical-system (MEMS) technology. Silicon-on-insulator (SOI) processes are used to demonstrate the feasibility of the new device, whereas the CMOS-MEMS processes are used to enable the integration of the photo detector and on-chip signal conditioning circuitry. Focused optical spot size measured by the reflection-type SOI device is demonstrated to be close to the diffraction limit. Preliminary measurement results of the CMOS-MEMS device are also presented.",
keywords = "CMOS MEMS, Diffraction limit, Focused optical spot, Knife edge, SOI",
author = "Chang, {Tzu Lin} and Tseng, {Victor Farm Guoo} and Yi Chiu",
year = "2007",
month = dec,
day = "1",
doi = "10.1109/OMEMS.2007.4373825",
language = "English",
isbn = "1424406412",
series = "2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS",
pages = "31--32",
booktitle = "2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS",
note = "null ; Conference date: 12-08-2007 Through 16-08-2007",
}