Micro knife-edge optical measurement devices fabricated by SOI and CMOS MEMS processes

Tzu Lin Chang*, Victor Farm Guoo Tseng, Yi Chiu

*Corresponding author for this work

研究成果: Conference contribution同行評審

摘要

The knife-edge method is a commonly used technique to characterize the optical profiles of laser beams or focused optical spots. In this paper, we present the design, fabrication, and test of a micro knife-edge scanner based on the micro-electromechanical-system (MEMS) technology. Silicon-on-insulator (SOI) processes are used to demonstrate the feasibility of the new device, whereas the CMOS-MEMS processes are used to enable the integration of the photo detector and on-chip signal conditioning circuitry. Focused optical spot size measured by the reflection-type SOI device is demonstrated to be close to the diffraction limit. Preliminary measurement results of the CMOS-MEMS device are also presented.

原文English
主出版物標題2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS
頁面31-32
頁數2
DOIs
出版狀態Published - 1 十二月 2007
事件2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS - Hualien, Taiwan
持續時間: 12 八月 200716 八月 2007

出版系列

名字2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS

Conference

Conference2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS
國家Taiwan
城市Hualien
期間12/08/0716/08/07

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