Micro-fabrication of hemispherical poly-silicon shells standing on hemispherical cavities

Cheng Hsuan Lin*, Yi Chung Lo, Wen-Syang Hsu

*Corresponding author for this work

研究成果: Conference article同行評審

2 引文 斯高帕斯(Scopus)

指紋 深入研究「Micro-fabrication of hemispherical poly-silicon shells standing on hemispherical cavities」主題。共同形成了獨特的指紋。

Mathematics

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy