Low-temperature growth of ZnO nanorods in anodic aluminum oxide on Si substrate by atomic layer deposition

Ching Jung Yang*, Shun Min Wang, Shih Wei Liang, Yung Huang Chang, Chih Chen, Jia Min Shieh

*Corresponding author for this work

研究成果: Article

68 引文 斯高帕斯(Scopus)

摘要

Low-temperature growth of self-organized ZnO nanorods on Si substrate is achieved using anodic aluminum oxide and atomic layer deposition at 250°C without catalyst or seed layer. Photoluminescence spectrum indicates that the ZnO nanorod arrays exhibit a bluegreen luminescence at 480 nm. In addition, the nanorod arrays demonstrate excellent field-emission properties with a turn-on electric field of 6.5 V μ m-1 and a threshold electric field of 9.8 V μ m-1, which are attributed to the perfectly perpendicular alignment of ZnO nanorods to the Si substrate.

原文English
文章編號033104
期刊Applied Physics Letters
90
發行號3
DOIs
出版狀態Published - 29 一月 2007

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