Low-leakage tetragonal ZrO 2 (EOT < 1 nm) with in situ plasma interfacial passivation on germanium

Chen Han Chou*, Hao Hsuan Chang, Chung Chun Hsu, Wen Kuan Yeh, Chao Hsin Chien

*Corresponding author for this work

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指紋 深入研究「Low-leakage tetragonal ZrO <sub>2</sub> (EOT < 1 nm) with in situ plasma interfacial passivation on germanium」主題。共同形成了獨特的指紋。

Chemical Compounds

Engineering & Materials Science