Laser-induced decomposition and ablation dynamics studied by nanosecond interferometry: 4. A polyimide film

Tomokazu Masubuchi, Takuji Tada, Eiji Nomura, Koji Hatanaka, Hiroshi Fukumura, Hiroshi Masuhara*

*Corresponding author for this work

研究成果: Article同行評審

19 引文 斯高帕斯(Scopus)

摘要

Intense excimer laser excitation of polyimide film gives transient expansion and the following contraction, permanent Swelling, and ablation, depending on excitation wavelength and fluence. Ablation by 248 nm excitation takes place only during the excitation laser pulse, and no debris were observed, while that by 351 nm excitation is brought about after sudden expansion. Permanent swelling was observed only for 351 nm excitation, and distinct differences in expansion and contraction behavior were observed between 248 and 351 nm excitation. On the basis of the morphological dynamics, it is shown that photochemical and photothermal mechanisms can explain mostly the results obtained by 248 and 351 nm excitation, respectively.

原文English
頁(從 - 到)2180-2186
頁數7
期刊Journal of Physical Chemistry A
106
發行號10
DOIs
出版狀態Published - 14 三月 2002

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