Lanthanide (Tb)-doped HfO2 for high-density MIM capacitors

Sun Jung Kim, Byung Jin Cho*, Ming Fu Li, Chunxiang Zhu, Albert Chin, Dim Lee Kwong

*Corresponding author for this work

研究成果: Letter同行評審

21 引文 斯高帕斯(Scopus)

摘要

A high-density metal-insulator-metal (MIM) capacitor with a lanthanide-doped HfO2 dielectric prepared by physical vapor deposition (PVD) is presented for the first time. A significant improvement was shown in both the voltage coefficient of capacitance (VCC) and the leakage current density of MIM capacitor, yet the high capacitance density of HfO2 dielectrics was maintained by achieving the doping of Tb with an optimum concentration in HfO2. This technique allows utilizing thinner dielectric film in MIM capacitors and achieving a capacitance density as high as 13.3 fF/μm2 with leakage current and VCC values that fully meet requirements from year 2005 for radio frequency (RF) bypass capacitors applications.

原文English
頁(從 - 到)442-444
頁數3
期刊IEEE Electron Device Letters
24
發行號7
DOIs
出版狀態Published - 1 七月 2003

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