Integration of microwave-annealed oxidation on germanium metal-oxide-semiconductor devices

Chung Chun Hsu, Wei Chun Chi, Yi He Tsai, Ming Li Tsai, Shin Yuan Wang, Chen Han Chou, Jun Lin Zhang, Guang Li Luo, Chao-Hsin Chien*

*Corresponding author for this work

研究成果: Article › 同行評審

1 引文 斯高帕斯（Scopus）

指紋 深入研究「Integration of microwave-annealed oxidation on germanium metal-oxide-semiconductor devices」主題。共同形成了獨特的指紋。

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy