Inductive CMOS MEMS accelerometer with integrated variable inductors

Yi Chiu*, Hao-Chiao Hong, Chia Wei Lin

*Corresponding author for this work

研究成果: Conference contribution同行評審

4 引文 斯高帕斯(Scopus)

摘要

This paper reports an inductive CMOS MEMS accelerometer with integrated variable inductors as the position-sensing elements. Without conventional sensing comb fingers, the dependence of device characteristics on stress-induced structural deformation can be significantly reduced. The variable inductors are used in on-chip LC-tank oscillators. When the external acceleration deforms the inductors, the oscillation frequency variation is proportional to the inductance change and thus the acceleration. The frequency output can be easily converted to digital codes by using a counter. The integrated accelerometer was implemented by a commercial 0.18 μm 1P5M CMOS process and post-CMOS dry-etching processes. Experimental results showed the proposed accelerometer had a sensitivity of 150 kHz/g.

原文English
主出版物標題MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems
發行者Institute of Electrical and Electronics Engineers Inc.
頁面974-977
頁數4
ISBN(電子)9781509019731
DOIs
出版狀態Published - 26 二月 2016
事件29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016 - Shanghai, China
持續時間: 24 一月 201628 一月 2016

出版系列

名字Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
2016-February
ISSN(列印)1084-6999

Conference

Conference29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016
國家China
城市Shanghai
期間24/01/1628/01/16

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