Indentation-induced mechanical deformation behaviors of AlN thin films deposited on c -plane sapphire

Sheng Rui Jian*, Jenh-Yih Juang

*Corresponding author for this work

研究成果: Article › 同行評審

18 引文 斯高帕斯（Scopus）

指紋 深入研究「Indentation-induced mechanical deformation behaviors of AlN thin films deposited on c -plane sapphire」主題。共同形成了獨特的指紋。

Engineering & Materials Science

Chemical Compounds