In-situ measurement of wafer camber by a laser-feedback detector

Tiziana Tambosso, Silvano Donati, Ray-Hua Horng

研究成果: Conference contribution同行評審

摘要

Using a laser diode as an echo detector of the optical reflection from a wafer surface, we demonstrate a very compact and extremely simple optical probe capable of measuring the curvature radius of a wafer, inside an MOCVD chamber, on the range from a few meters to about 10 km.

原文English
主出版物標題2014 IEEE Photonics Conference, IPC 2014
發行者Institute of Electrical and Electronics Engineers Inc.
頁面360-361
頁數2
ISBN(電子)9781457715044
DOIs
出版狀態Published - 22 十二月 2014
事件27th IEEE Photonics Conference, IPC 2014 - San Diego, United States
持續時間: 12 十月 201416 十月 2014

出版系列

名字2014 IEEE Photonics Conference, IPC 2014

Conference

Conference27th IEEE Photonics Conference, IPC 2014
國家United States
城市San Diego
期間12/10/1416/10/14

指紋 深入研究「In-situ measurement of wafer camber by a laser-feedback detector」主題。共同形成了獨特的指紋。

引用此