Improving Thermal Stability and Interface State Density of High-κ Stacks by Incorporating Hf into an Interfacial Layer on p-Germanium

Yi He Tsai, Chen Han Chou, An Shih Shih, Yu Hau Jau, Wen Kuan Yeh, Yu Hsien Lin, Fu-Hsiang Ko, Chao-Hsin Chien*

*Corresponding author for this work

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Chemical Compounds

Engineering & Materials Science