Improvement in ferroelectric properties of sol-gel derived SrBi2Ta2O9 thin films with seeding layers

Ching Chich Leu*, Chao-Hsin Chien, Ming Jui Yang, Ming Che Yang, Tiao Yuan Huang, Hung Tao Lin, Chen Ti Hu

*Corresponding author for this work

研究成果: Conference article同行評審

1 引文 斯高帕斯(Scopus)


The effects of a seeding layer, which was deposited on Pt/TiO2/SiO2/Si substrates using magnetron sputtering, on the characteristics of sol-gel-deposited strontium-bismuth-tantalate (SBT) thin films are investigated. The seeding layer serves as nucleation sites so homogeneous crystalline SBT films of bismuth-layered structure (BLS) with fine grains are successfully obtained by 750°C rapid thermal annealing in O2 ambient. The remanent polarization (2Pr) improves from 12.1 to 18.8 μC/cm2 with the addition of the seeding layer. In addition, the seeding layer also results in a lower nucleation temperature, allowing the use of 700°C annealing for 10 min to grow SBT films that are fully crystallized with BLS phase and shows good ferroelectric properties. Finally, crystallinity and microstructures of SBT films are found to be strongly dependent on the thickness of the seeding layer. Optimum Ta-seeded SBT thin film crystallized at 700 °C for 10min depicts a higher 2Pr value (12.9 μC/cm2 (@5V) than that of the un-seeded films crystallized at 750 °C for 1min.

頁(從 - 到)189-194
期刊Materials Research Society Symposium - Proceedings
出版狀態Published - 1 一月 2002
事件Perovskite Materials - San Francisco, CA, United States
持續時間: 1 四月 20025 四月 2002

指紋 深入研究「Improvement in ferroelectric properties of sol-gel derived SrBi<sub>2</sub>Ta<sub>2</sub>O<sub>9</sub> thin films with seeding layers」主題。共同形成了獨特的指紋。