III-V MOSFETs with a new self-aligned contact

Xingui Zhang*, Huaxin Guo, Chih Hsin Ko, Clement H. Wann, Chao Ching Cheng, Hau Yu Lin, Hock Chun Chin, Xiao Gong, Phyllis Shi Ya Lim, Guang Li Luo, Chun Yen Chang, Chao-Hsin Chien, Zong You Han, Shih Chiang Huang, Yee Chia Yeo.

*Corresponding author for this work

研究成果: Conference contribution同行評審

17 引文 斯高帕斯(Scopus)

摘要

We report the first demonstration of III-V n-MOSFETs with self-aligned contact technology. The self-aligned contact was formed using a salicide-like process which is compatible with CMOS process flow. A new epitaxy process was developed to selectively form a thin continuous germanium-silicon (GeSi) layer on gallium arsenide (GaAs) source and drain (S/D) regions. Nickel was deposited and annealed to form NiGeSi, and unreacted metal was removed. A second anneal diffuses Ge and Si into GaAs to form heavily n+ doped regions, and a novel self-aligned nickel germanosilicide (NiGeSi) ohmic contact was achieved. MOSFETs with the new self-aligned metallization process were realized.

原文English
主出版物標題2010 Symposium on VLSI Technology, VLSIT 2010
頁面233-234
頁數2
DOIs
出版狀態Published - 19 十月 2010
事件2010 Symposium on VLSI Technology, VLSIT 2010 - Honolulu, HI, United States
持續時間: 15 六月 201017 六月 2010

出版系列

名字Digest of Technical Papers - Symposium on VLSI Technology
ISSN(列印)0743-1562

Conference

Conference2010 Symposium on VLSI Technology, VLSIT 2010
國家United States
城市Honolulu, HI
期間15/06/1017/06/10

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