High Q broadband copper spiral inductors with Q=45 on proton-bombarded semi-insulating silicon substrate

Heng Ming Hsu, Jiong Guang Su, Yo Sheng Lin, Ming Hao Tseng, Jason Chih Hsien Lin, Jack Yuan Chen Sun, Denny Tang, Tsing Tyan Yang, Ting Sien Tu, Li Fu Lin

研究成果: Conference contribution同行評審

9 引文 斯高帕斯(Scopus)

摘要

This paper reports the highest Q-factor inductor on silicon substrate. A local semi-insulating region under the 3μm-thick copper spiral inductor is created by high-energy proton bombardment. For a single-layer spiral 1.5 nH inductor, we obtained Q-factor greater than 25 over broad frequency band from 5-19 GHz and with the highest value being 45. Modeling of the inductor equivalent circuit shows that indeed the improvement of q-factor realists from the increase in the substrate resistivity.

原文English
主出版物標題2002 IEEE Asia-Pacific Conference on ASIC, AP-ASIC 2002 - Proceedings
發行者Institute of Electrical and Electronics Engineers Inc.
頁面113-116
頁數4
ISBN(電子)0780373634, 9780780373631
DOIs
出版狀態Published - 2002
事件3rd IEEE Asia-Pacific Conference on ASIC, AP-ASIC 2002 - Taipei, Taiwan
持續時間: 6 八月 20028 八月 2002

出版系列

名字2002 IEEE Asia-Pacific Conference on ASIC, AP-ASIC 2002 - Proceedings

Conference

Conference3rd IEEE Asia-Pacific Conference on ASIC, AP-ASIC 2002
國家Taiwan
城市Taipei
期間6/08/028/08/02

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