High precision eddy current damped electromagnetic positioner with flexure-suspension

Chih Hsien Lin, Shao-Kang Hung, Sang Tsung Li, Li Chen Fu

研究成果: Conference contribution同行評審

5 引文 斯高帕斯(Scopus)

摘要

This paper proposes a novel high precision planar electromagnetic-actuated positioning stage. The movable part of the stage is suspended by a monolithic parallel flexure mechanism, which motion comes from the deformation of the structure itself. A linear electromagnetic actuator which consists of a near-uniform magnetic field and four coils is designed and implementation to provide the propelling force for translational and rotational motions. An eddy current damper is designed and integrated with the electromagnetic actuator to suppress the vibration of the flexure, whose non-contact property is more advanced than the contact damper used in our previous researches. The design traveling range is 3mm × 3mm in planar motion. A 3-axis laser interferometer measurement system is utilized to feedback the position and posture information of the moving stage. The experimental results show the vibration of the flexure mechanism could be suppressed by the designed eddy current damper. The results also show the regulation and tracking performance by a well-designed robust adaptive sliding mode controller, which can overcome the disturbance and modeling uncertainty and guarantee a satisfactory performance.

原文English
主出版物標題2009 IEEE International Conference on Control Applications, CCA '09
頁面1568-1573
頁數6
DOIs
出版狀態Published - 1 十二月 2009
事件2009 IEEE International Conference on Control Applications, CCA '09 - Saint Petersburg, Russian Federation
持續時間: 8 七月 200910 七月 2009

出版系列

名字Proceedings of the IEEE International Conference on Control Applications

Conference

Conference2009 IEEE International Conference on Control Applications, CCA '09
國家Russian Federation
城市Saint Petersburg
期間8/07/0910/07/09

指紋 深入研究「High precision eddy current damped electromagnetic positioner with flexure-suspension」主題。共同形成了獨特的指紋。

引用此