High-performance poly-Si TFTs with fully Ni-self-aligned silicided S/D and gate structure

Po Yi Kuo*, Tien-Sheng Chao, Ren Jie Wang, Tan Fu Lei

*Corresponding author for this work

研究成果: Article › 同行評審

2 引文 斯高帕斯（Scopus）

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Chemical Compounds

Engineering & Materials Science