High On/Off ratio and very low leakage in p+/n and n +/p germanium/silicon heterojunction diodes

Che Wei Chen*, Cheng Ting Chung, Jyun Chih Lin, Guang Li Luo, Chao-Hsin Chien

*Corresponding author for this work

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3 引文 斯高帕斯(Scopus)


We demonstrate the characteristics of p+-Ge/n-Si and n +-Ge/p-Si heterojunction diodes with a very high on/off ratio and very low leakage current using heteroepitaxial Ge grown directly on Si. The current ratio of p+-Ge/n-Si and n+-Ge/p-Si heterojunction is ∼5 × 107 and ∼3 × 106, respectively. The remarkably low off current density is 2.1 μA/cm2 for p+-Ge/n-Si and 19 μA/cm2 for n+-Ge/p-Si at a reverse bias of |VF| = ±1 V, respectively. High on current density (125 A/cm2 for p+-Ge/n-Si and 54 A/cm 2 for n+-Ge/p-Si) with a forward bias |VF| = ±1 V is obtained with a GeO2 passivation and an Al 2O3 isolation.

期刊Applied Physics Express
出版狀態Published - 1 二月 2013

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