High numerical-aperture microlens fabricated by focused ion beam milling

Yi Chiu, Chien Hsun Huang, Ying Chien Hsu

研究成果: Conference contribution同行評審

摘要

A NA 0.65 microlens fabricated by focused ion beam milling in the silicon nitride film on a silicon substrate is presented. The measured NA is 0.64 and the focused spot size is 0.64 μm.

原文English
主出版物標題Optical Data Storage, ODS 2007
發行者Optical Society of America (OSA)
ISBN(列印)1557528403, 9781557528407
DOIs
出版狀態Published - 20 五月 2007
事件Optical Data Storage, ODS 2007 - Portland, OR, United States
持續時間: 20 五月 200720 五月 2007

出版系列

名字Optics InfoBase Conference Papers
ISSN(電子)2162-2701

Conference

ConferenceOptical Data Storage, ODS 2007
國家United States
城市Portland, OR
期間20/05/0720/05/07

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