HfO2 nanocrystal memory on SiGe channel

Yu Hsien Lin*, Chao-Hsin Chien

*Corresponding author for this work

研究成果: Article同行評審

5 引文 斯高帕斯(Scopus)


This study proposes a novel HfO2 nanocrystal memory on epi-SiGe (Ge: 15%) channel. Because SiGe has a smaller bandgap than that of silicon, it increases electron/hole injection and the enhances program/erase speeds. This study compares the characteristics of HfO2 nanocrystal memories with different oxynitride tunnel oxide thicknesses on Si and epi-SiGe substrate. Results show that the proposed nonvolatile memory possesses superior characteristics in terms of considerably large memory window for two-bits operation, high speed program/erase for low power applications, long retention time, excellent endurance, and strong immunity to disturbance.

頁(從 - 到)5-9
期刊Solid-State Electronics
出版狀態Published - 1 一月 2013

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