Growth parameter effect in superconducting YBa2Cu4O8 thin films by d.c. magnetron sputtering

S. C. Wu*, H. T. Hsu, F. H. Chen, W. R. Chang, Tseung-Yuen Tseng

*Corresponding author for this work

研究成果: Article同行評審

4 引文 斯高帕斯(Scopus)

摘要

High- Tc YBa2Cu4O8 (124) thin films have been made by d.c. magnetron sputtering deposition on (100) MgO substrates. The effect of several processing variables, including the ratio of oxygen to argon, total pressure, and substrate temperature, on the superconducting properties of the thin films, were systematically investigated. The as-prepared films annealed in flowing oxygen at 800°C for 4 h under ambient pressure obtained nearly phase-pure 124 and exhibited superconducting onset transition at 75 K.

原文English
頁(從 - 到)5593-5598
頁數6
期刊Journal of Materials Science
29
發行號21
DOIs
出版狀態Published - 十一月 1994

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