FPGA-based motion controller for wafer-handling robot

Hsin Hung Chou, Ying Shieh Kung, Tai Wei Tsui, Stone Cheng

研究成果: Article同行評審

2 引文 斯高帕斯(Scopus)

摘要

This study applies FPGA (Field Programmable Gate Arrays) technology to implement a motion controller for wafer-handling robot which has three-DOF (Degree of Freedom) motion. The proposed FPGA-based motion controller has two modules. The first module is Nios II processor which is used to realize the motion trajectory computation and the three-axis position/speed controllers. The second module is demonstrated to implement the three-axis current vector controllers by using FPGA hardware, and VHDL (VHSIC Hardware Description Language) is adopted to describe the controller behavior. Therefore, a fully digital motion controller for wafer-handling robot, such as one trajectory planning, three current vector controllers and three position/speed controllers are all implemented with an FPGA chip.

原文English
頁(從 - 到)427-437
頁數11
期刊Transactions of the Canadian Society for Mechanical Engineering
37
發行號3
DOIs
出版狀態Published - 1 十二月 2013

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