Formation of shallow p+n junctions by implanting BF2- ions into thin cobalt films on silicon substrates

M. H. Juang*, Huang-Chung Cheng

*Corresponding author for this work

研究成果: Article同行評審

13 引文 斯高帕斯(Scopus)

指紋 深入研究「Formation of shallow p<sup>+</sup>n junctions by implanting BF<sub>2</sub><sup>-</sup> ions into thin cobalt films on silicon substrates」主題。共同形成了獨特的指紋。

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy