Fast electrothermally activated micro-positioner using a high-aspect-ratio micro-machined polymeric composite

Gih Keong Lau*, Jiaping Yang, Borriboon Thubthimthong, Nyok Boon Chong, Cheng Peng Tan, Zhimin He

*Corresponding author for this work

研究成果: Article同行評審

9 引文 斯高帕斯(Scopus)

摘要

Recently, silicon electrothermal micro-actuators have been developed for dual-stage micropositioning in hard disk drive. But, silicon with a low coefficient of thermal expansion (CTE) has a shortcoming of requiring a large temperature change (>300 °C) to expand adequately. This letter presented a high-CTE polymer composite to solve the shortcoming of silicon. The polymer composite consists of high-aspect-ratio micro-machined SU-8 thermal expander and silicon thermal conductor. A micro-positioner which embodies the proposed polymer composite can drive a slider to travel fast (>1 kHz) more than a 17 nm-pitch data track under a moderate temperature rise (100 °C).

原文English
文章編號033108
期刊Applied Physics Letters
101
發行號3
DOIs
出版狀態Published - 16 七月 2012

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