Fabrication of microlens arrays in photosensitive glass by femtosecond laser direct writing

C. H. Lin, L. Jiang, Y. H. Chai, H. Xiao, Shean-Jen Chen, H. L. Tsai

研究成果: Article同行評審

59 引文 斯高帕斯(Scopus)

摘要

This article reports the fabrication of high-fill-factor plano-convex cylindrical and spherical microlens arrays horizontally and vertically embedded in a photosensitive Foturan glass chip by femtosecond (fs) laser micromachining. The microlens arrays were fabricated by modifying the microstructure of Foturan glass using fs laser direct writing followed by thermal treatment, wet etching, and additional annealing. The focusing ability and image quality of the microlens arrays were examined, showing that the lens arrays not only can focus light well but also provide an imaging capability that holds great potential for lab-on-a-chip applications.

原文English
頁(從 - 到)751-757
頁數7
期刊Applied Physics A: Materials Science and Processing
97
發行號4
DOIs
出版狀態Published - 1 十二月 2009

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