Fabrication of InGaN/GaN nanodisk structure by using bio-template and neutral beam etching process

Yi-Chun Lai, Akio Higo, Chang Yong Lee, Cedric Thomas, Tomoyuki Tanikawa, Kanako Shojiki, Shigeyuki Kuboya, Ryuji Katayama, Takayuki Kiba, Pei-Chen Yu, Ichiro Yamashita, Akihiro Murayama, Seiji Samukawa

研究成果: Conference contribution同行評審

指紋 深入研究「Fabrication of InGaN/GaN nanodisk structure by using bio-template and neutral beam etching process」主題。共同形成了獨特的指紋。

Chemical Compounds

Engineering & Materials Science