Systematic investigations were conducted to determine the effect of deposition conditions on the microstructure and superconducting properties of YBa 2 Cu 3 O 7-x thin films produced by d.c. magnetron sputtering on (001) MgO substrate. The films were c-axis preferentially oriented with respect to the (001) MgO surface at substrate temperatures of 680-700°C. X-ray diffraction patterns clearly indicated the existence of the c-axis alignment normal to the substrate surface and some second phases. The second phases, including a Cu-rich phase and Y 2 O 3 , were identified by energy dispersive X-ray spectrometer and the microstructures were analysed by electron and atomic force microscopes.
|頁（從 - 到）||67-76|
|期刊||Journal of Materials Science: Materials in Electronics|
|出版狀態||Published - 1 一月 1996|